Emergency Off Button
Safely shuts down the FE-SEM in an emergency.
EVAC POWER Switch
Switch is set at 1 (ON) for Preliminary Operation.
DP/TMP, WATER, and AIR PRES Lamps
Should be lit during Preliminary Operation.
OBJ. APT. Switch
Set to HEAT for Preliminary Operation. The aperture is heated to about 150 degrees Celsius. This removes over 90% of the contaminants that would be present at room temperature.
IP1, IP2, and IP3 Lamps
Should be lit during Preliminary Operation.
Ion Pump Readings
During Preliminary Operation, these should read better than the following:
IP1: 2 x 10-7 Pa
IP2: 2 x 10-6 Pa
IP3: 7 x 10-5 Pa
Chamber Vacuum Lamps
Specimen Chamber (S. C.) and Specimen Evacuation Chamber (S. E. C) HIGH lamps should be lit during Preliminary Operation (not shown here).
SC/SEC Vacuum Meter
Gun Valve
Switch is set to AUTO and the OPEN lamp is flickering during Preliminary Operation (not shown).
Chamber Vacuum Switches
EVAC and AIR for Specimen Chamber (S. C) and Specimen Evacuation Chamber (S. E. C).