Electron Optics Facility

FE-SEM

The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope.

Hitachi S-4700 FE-SEM

Overview

The Hitachi S-4700 FE-SEM is a cold field emission high resolution scanning electron microscope. This SEM permits ultra high resolution imaging of thin films and semi-conductor materials on exceptionally clean specimens. It is also suitable for polymeric materials. The S-4700 is configured to detect secondary and backscattered electrons as well as characteristic X-rays. The system is fully automated and is operated via easy-to-use menu driven software.

Close up the primary instrumentation for the FE-SEM.

Capabilities

  • Secondary imaging can be carried out at short working distances with an overhead detector or at longer distances with a side-mounted detector, and these SE detector signals can be isolated or mixed.
  • Backscatter imaging can be accomplished at accelerating voltages as low as 1 kV at high resolution with the Hitachi-proprietary ExB detector.
  • The menu based Windows software and greater automation will lead to greater ease of use for most individuals.
  • Energy dispersive analysis is provided via an ultra thin window detector.
  • Analysis of elements from boron through uranium is possible with this detection system.
  • It is interfaced with a Gresham Titan Analog HV Power Supply / Pulse Processor and 4Pi Spectral Engine Hardware with DTSA and Revolution Software.
  • Software is available in these packages for X-ray mapping, qualitative, standardless and rigorous standards-based quantitative analysis.
  • The S-4700 FE-SEM system is interfaced to the campus network so all user data can be downloaded to user storage systems from the laboratory.

Data Transfer

There is a new Linux computer in the FESEM. Below are instructions for data transfer from the FESEM: 

  1. Obtain the provided USBs designated for data transfer.
  2. Move the switch on the USB to the unlocked position.
  3. Insert the USB into the FESEM computer.
  4. Locate the data you wish to transfer on the FESEM computer.
  5. Copy the desired data onto the USB.
  6. Once the transfer is complete, safely eject the USB from the FESEM computer.
  7. Move the switch on the USB to the locked position.
  8. Insert the USB into the Linux computer.
  9. Log in to the Linux computer using your Single Sign-On (SSO) credential.
  10. Access the data on the USB from the Linux computer.
  11. Copy the necessary files from the USB to the Linux computer.
  12. Remember not to add any data to the USB while it is in the locked position.

Note: Only use the provided USB for data transfer from the FESEM.

Good Practices

Column Alignment

Use the software only when you do the alignments. Do not change the physical knobs of the apertures.

Beam Monitor Aperture

The beam monitor aperture is set at position 2 and should be kept at 2.

Objective Aperture

If you ever need to change the objective aperture, only use the knob to switch between apertures 1, 3, or 4. Do not use aperture 2. 

Objective aperture sizes: 1 > 3 = 2 > 4

Attn.: Objective apertures 2 and 3 have the same size. We exchange them annually when one or the other gets dirty. This year (2024–25) we are using 3.

Home Stage

Home stage position is:

  • X = Y = Z = 12.5 mm
  • Tilt = 0
  • Rotation = 0

Vendor

4pi Analysis, Inc. engineers and sells X-ray Microanalysis and Digital Imaging Systems. (NOTE: 4pi has ceased manufacturing and sales. ACMAL is confident that this will not affect 4pi’s ability to provide technical support to this lab.)

A research micrograph from the FE-SEM.

Training

eTraining

Free online eTraining is available for this instrument. This self-paced tutorial and reference content does not replace course requirements for authorized usage.

Hitachi S-4700 FE-SEM Online Training

Courses

Michigan Tech offers many undergraduate and graduate courses related to materials characterization.