FE-SEM X-Ray Mapping

NOTE: The current drops quickly over the first 30 minutes of use. Wait until the current is stable before X-ray mapping.

EDS image mode icon.

1. Select Mode > EDS Image.


EDX image acquisition in image setup icon.

2. Select the Setup icon. Choose an appropriate dwell time in EDX Image Acquisition.

NOTE: For the low resolution test collection, use a dwell of 5 ms. For any higher resolution maps, a dwell time between 5 and 20 ms is suitable.

In the EDX Image Setup window, choose Edit Setup under EDX Image Processing. Setup icon.


Select elements in ROI processing icon.

3. Select elements by clicking in the element's box.


Edit element color icon.

4. To assign a different color to each element, right-click on the element > select Edit > Set Color > and choose a color. Click OK.


5. Select OK in the EDX Image Setup menu once all of your choices have been made.


Options icon.

6. Choose the correct magnification and kV in Options. NOTE: If the correct magnification is not in the preset menu, you will be able to manually enter the correct magnification in the Step 7 after selecting the camera icon.


EDX image low resolution icon.

7. Perform a quick acquisition first by choosing a low resolution map of 320 x 240 in EDX Image.


Enter Magnification icon.

8. Select the camera icon in EDX Image. Once you select the icon, a magnification dialog box appears. Enter the correct magnification. Camera icon.


Four windows showing maps icon.

The map consists of a secondary electron image and a scan for each element chosen.


ROI Processing menu icon.

9. Once the acquisition has begun, you can still edit the collection in live time by right-clicking in the image area and selecting ROI Processing. A menu with the same functions as the Setup menu will appear.


ROI Processing element table icon.

Use the directions in Step 3 to edit.


10. If the map is satisfactory, perform again using a high resolution.


11. Save the map in your directory in the “Temporary User Files” folder.


Special thanks to Chuck Herrington of Geller MicroÅnalytical Lab, Inc., who reviewed much of the Microanalysis content.

FAQs