FIB Bitmap Image Milling (SEM/TEM)

• To Upload a Pattern
• To Create a New Pattern

To Upload a Pattern

1. Select Option > Vector Scan Controller.
2. Insert your floppy disk into the drive and select Option > Transfer > BMP.
3. In the file window, click Files. Highlight the file of interest and click Transfer > Open. Your pattern should appear in the fabrication window when you exit the file display.
4. Choose a desired area and zoom and then acquire an image. Adjust focus, contrast, and brightness as necessary.
5. Position your pattern over the proper site on the specimen image. Under the Draw menu, you may:
   1. Change the Line Width (Options: 2, 4, 8, 16, other).
   2. Rotate your pattern.
   3. Fill your pattern by selecting your pattern and pressing Box.
6. Select File > Save Vect and input a file name. Hit Enter so the filename text turns black > Open. If you fail to press Enter, the processing conditions will not be saved.
7. Select File > Save Conditions. Type in a file name and select your vector file name (or a different vector) on the right. As a convenient naming convention, create identical names for your vector and condition files. Set Dwell time (1 to 128), Frame (No. of deflections, 1 to 4.2x109), and Beam Name > OK.
8. For understanding:
9. Loop Time and Dwell Time will automatically change according to your chosen settings. Loop Time= Dwell Time x #Deflection Points and Total Time (min.) = Loop Time x Frame Number.
10. In the list display of files in Fabrication Setup, double click your file name. A scaled version of your pattern should appear to the right. Finally, click the blue and white Fabrication Start button to begin the milling.
11. Always check your patterns using the M0-50 beam to prevent unnecessary beam milling.
12. Continue with the above procedure until you have completed milling all elements of your pattern. Remove floppy disk and proceed to Shutdown when you have finished your milling session.

To Create a New Pattern

1. Choose the appropriate area and zoom conditions, select File > New and acquire an image. Adjust focus, contrast, and brightness as necessary.
2. Use the DRAWING TOOLS (Point, Line, Circle, Square, Arc, and Trace) to create a pattern. NOTE: DO NOT USE THE POLYGON DRAWING TOOL. The software will not allow you to exit the drawing mode and the system will need to be re-started.
3. Under the Draw menu, you may:
   1. Change the Line Width (Options: 2, 4, 8, 16, other).
   2. Rotate your pattern.
   3. Fill your pattern by selecting your pattern and pressing Box.
4. Place your pattern over the proper site on the specimen image.
5. Select File > Save Vect and input a file name. Hit Enter so the filename text turns black > Open. If you fail to press Enter, the processing conditions will not be saved.
6. Select File > Save Conditions. Type in a file name and select your vector file name on the right. As a convenient naming convention, create identical names for your vector and condition files. Set Dwell time (1 to 128), Frame (No. of deflections, 1 to 4.2x109), and Beam Name > OK.
7. For understanding:
8. Loop Time and Dwell Time will automatically change according to your chosen settings. Loop Time= Dwell Time x #Deflection Points and Total Time (min.) = Loop Time x Frame Number.
9. In the list display of files in Fabrication Setup, double click your file name. Finally, click the blue and white Fabrication Start button to begin the milling.
10. Always check your patterns using the M0-50 beam to prevent unnecessary beam milling.
11. Continue with the above procedure until you have completed milling all elements of your pattern. Remove floppy disk and proceed to Shutdown when you have finished your milling session.

Operating Procedure: Using the NPGS Software