FIB Tungsten Deposition

NOTE: Drift is always down. Use Speed: RAPID.

  1. Load specimen and focus. Record the focus voltage from the Column Adjustment menu.
  2. Pull the specimen HOLDER rod into the detent position. (See Step 4 of the Lift Out Technique in Operating Procedures under Hitachi FB-2000A FIB.)
  3. Insert the depo gun and focus on the depo gun nozzle. The depo gun should be visible in the top right hand corner of the viewing screen at area: 256. Record the focus voltage.
  4. 3–5 coarse clicks to the left of the focus slider should return you to the recorded specimen focus.
  5. Move the depo gun out and then in again to check positioning. Finally move the gun out.
  6. Put both the specimen back and the depo gun back in for a final check.

Operating Procedure: FIB Bitmap Image Milling (SEM/TEM)